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简单介绍：
Plasma Deposition/Etch 1.Sputtering/PVD/RTP 2.Industrial CVD/Ion 3.Implantation LPCVD 4.Crystal Growing/Freeze Dryers 5.Model 764/769/774美国西特setra**压力变送器
详情介绍：
Models 764/769/774


 

Model 764/769/774美国西特setra**压力变送器

Applications

  • Plasma Deposition/Etch
  • Sputtering/PVD/RTP 
  • Industrial CVD/Ion Implantation
  • LPCVD
  • Crystal Growing/Freeze Dryers
Heated 700 Series Specifications
Model 764Temperature controlled to 45°C 
Model 769Temperature controlled to 100°C
Model 774Temperature controlled to 123°C
Type of PressureAbsolute
Electrical Output (Voltage)

0 to 10 VDC

Resolution

0.005% of FS

Accuracy±0.15% of Reading + 005% of FS
Excitation

±15 VDC ±5% Regulated to 1%

Pressure Ranges100 mTorr: Model 764 and 769 only
0 to 1, 2, 10, 100, 1000 Torr
1, 10, 100, 1000 Millibar/hPa
Thermal Effects
Compensated Range °C: +15 to +40
Zero Shift: >1 Torr = 0.002% FS/°C 
                <=  1="" torr="0.005%" fs="" °cSpan Shift: ±0.02% Rdg/°C 
MediaGases compatible with Inconel®

Model 764/769/774美国西特setra**压力变送器资料Click here for data sheet Model 764/769/774

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